VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
OLD OXIDIZED Si3N4 COATING (90 DEG TOA, AS RECEIVE
1
 
NORM
REGULAR
6
0
0
0
0
0
6
 
OLD OXIDIZED Si3N4 COATING (90 DEG TOA, AS RECEIVE
2003
5
10
14
54
12
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
4
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
108
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
512
15
894
0.311316
0.314018
57
0.314018
45
0.314008
54
0.313997
49
0.313986
63
0.313975
55
0.313965
55
0.313954
48
0.313943
52
0.313933
68
0.313922
55
0.313911
56
0.313901
65
0.31389
67
0.313879
61
0.313868
58
0.313858
60
0.313847
52
0.313836
51
0.313826
55
0.313815
42
0.313804
54
0.313793
59
0.313783
49
0.313772
64
0.313761
51
0.313751
50
0.31374
58
0.313729
52
0.313719
52
0.313708
43
0.313697
49
0.313687
47
0.313676
69
0.313665
51
0.313654
44
0.313644
51
0.313633
52
0.313622
56
0.313612
39
0.313601
46
0.31359
54
0.31358
44
0.313569
47
0.313558
45
0.313548
31
0.313537
46
0.313526
39
0.313516
39
0.313505
28
0.313494
33
0.313484
43
0.313473
37
0.313462
33
0.313452
36
0.313441
29
0.31343
37
0.31342
29
0.313409
37
0.313398
47
0.313388
24
0.313377
24
0.313366
31
0.313356
21
0.313345
29
0.313334
29
0.313324
24
0.313313
34
0.313302
29
0.313292
36
0.313281
26
0.31327
31
0.31326
31
0.313249
30
0.313238
34
0.313228
28
0.313217
28
0.313207
32
0.313196
34
0.313185
30
0.313175
46
0.313164
26
0.313153
27
0.313143
27
0.313132
25
0.313121
39
0.313111
36
0.3131
32
0.313089
23
0.313079
39
0.313068
25
0.313058
30
0.313047
28
0.313036
35
0.313026
33
0.313015
35
0.313004
41
0.312994
36
0.312983
40
0.312973
39
0.312962
38
0.312951
52
0.312941
49
0.31293
64
0.312919
55
0.312909
73
0.312898
64
0.312888
87
0.312877
94
0.312866
88
0.312856
112
0.312845
139
0.312835
143
0.312824
183
0.312813
190
0.312803
217
0.312792
222
0.312781
275
0.312771
271
0.31276
330
0.31275
351
0.312739
446
0.312728
467
0.312718
512
0.312707
495
0.312697
633
0.312686
665
0.312675
675
0.312665
675
0.312654
829
0.312644
853
0.312633
873
0.312622
894
0.312612
869
0.312601
854
0.312591
869
0.31258
836
0.31257
793
0.312559
835
0.312548
795
0.312538
704
0.312527
688
0.312517
651
0.312506
561
0.312495
486
0.312485
468
0.312474
401
0.312464
363
0.312453
266
0.312443
273
0.312432
216
0.312421
211
0.312411
165
0.3124
152
0.31239
124
0.312379
117
0.312369
94
0.312358
85
0.312347
73
0.312337
77
0.312326
57
0.312316
59
0.312305
45
0.312295
35
0.312284
47
0.312273
38
0.312263
39
0.312252
35
0.312242
37
0.312231
33
0.312221
39
0.31221
35
0.3122
28
0.312189
27
0.312178
29
0.312168
29
0.312157
26
0.312147
28
0.312136
24
0.312126
25
0.312115
31
0.312105
36
0.312094
21
0.312083
25
0.312073
30
0.312062
25
0.312052
28
0.312041
22
0.312031
24
0.31202
25
0.31201
35
0.311999
27
0.311989
25
0.311978
28
0.311968
18
0.311957
21
0.311947
35
0.311936
19
0.311925
27
0.311915
22
0.311904
23
0.311894
23
0.311883
23
0.311873
28
0.311862
19
0.311852
24
0.311841
18
0.311831
28
0.31182
35
0.31181
20
0.311799
25
0.311789
27
0.311778
24
0.311768
29
0.311757
24
0.311747
17
0.311736
20
0.311726
21
0.311715
29
0.311705
23
0.311694
31
0.311684
31
0.311673
29
0.311663
17
0.311652
26
0.311641
25
0.311631
29
0.31162
27
0.31161
26
0.311599
25
0.311589
15
0.311578
34
0.311568
22
0.311557
30
0.311547
29
0.311536
22
0.311526
32
0.311516
22
0.311505
24
0.311495
32
0.311484
28
0.311474
32
0.311463
21
0.311453
25
0.311442
35
0.311432
29
0.311421
35
0.311411
23
0.3114
23
0.31139
27
0.311379
18
0.311369
25
0.311358
23
0.311348
28
0.311337
24
0.311327
18
0.311316
 
OLD OXIDIZED Si3N4 COATING (90 DEG TOA, AS RECEIVE
2003
5
10
14
54
12
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
4
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
404
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
512
135
2623
0.35906
0.363026
268
0.363026
282
0.36301
252
0.362994
265
0.362978
254
0.362962
222
0.362947
236
0.362931
248
0.362915
252
0.362899
271
0.362884
235
0.362868
252
0.362852
248
0.362836
238
0.362821
221
0.362805
251
0.362789
231
0.362773
228
0.362758
234
0.362742
243
0.362726
249
0.36271
233
0.362695
225
0.362679
225
0.362663
205
0.362647
241
0.362632
263
0.362616
260
0.3626
199
0.362584
232
0.362569
213
0.362553
245
0.362537
230
0.362522
237
0.362506
207
0.36249
221
0.362474
225
0.362459
229
0.362443
216
0.362427
217
0.362412
199
0.362396
193
0.36238
207
0.362364
204
0.362349
209
0.362333
215
0.362317
185
0.362302
194
0.362286
206
0.36227
209
0.362255
175
0.362239
201
0.362223
209
0.362207
210
0.362192
210
0.362176
202
0.36216
191
0.362145
209
0.362129
214
0.362113
203
0.362098
195
0.362082
171
0.362066
215
0.362051
141
0.362035
211
0.362019
178
0.362004
175
0.361988
155
0.361972
173
0.361957
210
0.361941
186
0.361925
167
0.36191
177
0.361894
169
0.361878
179
0.361863
189
0.361847
176
0.361832
177
0.361816
199
0.3618
187
0.361785
191
0.361769
166
0.361753
194
0.361738
193
0.361722
174
0.361706
181
0.361691
175
0.361675
206
0.36166
183
0.361644
178
0.361628
173
0.361613
191
0.361597
187
0.361581
173
0.361566
182
0.36155
189
0.361535
214
0.361519
199
0.361503
198
0.361488
197
0.361472
197
0.361457
199
0.361441
202
0.361425
228
0.36141
216
0.361394
203
0.361379
214
0.361363
220
0.361347
207
0.361332
197
0.361316
243
0.361301
238
0.361285
248
0.36127
262
0.361254
247
0.361238
282
0.361223
262
0.361207
294
0.361192
308
0.361176
336
0.361161
335
0.361145
418
0.361129
468
0.361114
518
0.361098
600
0.361083
722
0.361067
822
0.361052
948
0.361036
1044
0.361021
1230
0.361005
1451
0.360989
1609
0.360974
1764
0.360958
1964
0.360943
2090
0.360927
2224
0.360912
2378
0.360896
2412
0.360881
2601
0.360865
2623
0.36085
2552
0.360834
2509
0.360819
2438
0.360803
2313
0.360788
2151
0.360772
2015
0.360756
1864
0.360741
1646
0.360725
1540
0.36071
1276
0.360694
1143
0.360679
958
0.360663
890
0.360648
771
0.360632
683
0.360617
575
0.360601
484
0.360586
438
0.36057
450
0.360555
393
0.360539
351
0.360524
309
0.360508
259
0.360493
252
0.360477
256
0.360462
241
0.360446
243
0.360431
248
0.360416
225
0.3604
174
0.360385
218
0.360369
225
0.360354
176
0.360338
180
0.360323
207
0.360307
183
0.360292
169
0.360276
206
0.360261
159
0.360245
166
0.36023
192
0.360214
179
0.360199
161
0.360184
175
0.360168
173
0.360153
185
0.360137
173
0.360122
158
0.360106
175
0.360091
157
0.360075
174
0.36006
190
0.360045
161
0.360029
171
0.360014
165
0.359998
181
0.359983
191
0.359967
178
0.359952
162
0.359936
169
0.359921
168
0.359906
177
0.35989
172
0.359875
168
0.359859
153
0.359844
159
0.359829
159
0.359813
173
0.359798
162
0.359782
174
0.359767
153
0.359752
174
0.359736
178
0.359721
144
0.359705
161
0.35969
173
0.359675
178
0.359659
215
0.359644
177
0.359628
142
0.359613
155
0.359598
169
0.359582
172
0.359567
168
0.359551
158
0.359536
152
0.359521
151
0.359505
186
0.35949
169
0.359475
172
0.359459
158
0.359444
157
0.359428
148
0.359413
135
0.359398
165
0.359382
171
0.359367
162
0.359352
162
0.359336
153
0.359321
169
0.359306
159
0.35929
183
0.359275
183
0.35926
176
0.359244
183
0.359229
188
0.359213
176
0.359198
199
0.359183
183
0.359167
143
0.359152
192
0.359137
176
0.359121
170
0.359106
173
0.359091
165
0.359075
152
0.35906
 
OLD OXIDIZED Si3N4 COATING (90 DEG TOA, AS RECEIVE
2003
5
10
14
54
14
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
4
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
292
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
512
0
2170
0.338811
0.342204
117
0.342204
89
0.34219
80
0.342177
97
0.342163
102
0.34215
72
0.342136
84
0.342123
84
0.342109
87
0.342096
150
0.342082
107
0.342069
90
0.342055
91
0.342042
136
0.342028
89
0.342015
85
0.342001
112
0.341988
107
0.341975
90
0.341961
81
0.341948
46
0.341934
85
0.341921
68
0.341907
106
0.341894
85
0.34188
70
0.341867
91
0.341854
78
0.34184
109
0.341827
108
0.341813
95
0.3418
114
0.341786
90
0.341773
129
0.341759
67
0.341746
20
0.341733
52
0.341719
89
0.341706
106
0.341692
126
0.341679
106
0.341665
112
0.341652
84
0.341639
73
0.341625
95
0.341612
48
0.341598
64
0.341585
76
0.341572
103
0.341558
70
0.341545
124
0.341531
97
0.341518
85
0.341504
86
0.341491
55
0.341478
86
0.341464
103
0.341451
111
0.341437
138
0.341424
115
0.341411
91
0.341397
91
0.341384
109
0.34137
82
0.341357
46
0.341344
115
0.34133
84
0.341317
94
0.341304
79
0.34129
71
0.341277
67
0.341263
69
0.34125
42
0.341237
104
0.341223
113
0.34121
92
0.341196
93
0.341183
108
0.34117
97
0.341156
138
0.341143
121
0.34113
106
0.341116
104
0.341103
104
0.34109
95
0.341076
160
0.341063
135
0.341049
229
0.341036
194
0.341023
175
0.341009
130
0.340996
232
0.340983
227
0.340969
261
0.340956
164
0.340943
218
0.340929
218
0.340916
209
0.340903
225
0.340889
211
0.340876
203
0.340863
194
0.340849
170
0.340836
186
0.340823
164
0.340809
157
0.340796
199
0.340783
178
0.340769
249
0.340756
176
0.340743
184
0.340729
215
0.340716
216
0.340703
203
0.340689
208
0.340676
172
0.340663
241
0.340649
236
0.340636
287
0.340623
265
0.340609
350
0.340596
348
0.340583
296
0.340569
304
0.340556
347
0.340543
368
0.340529
405
0.340516
417
0.340503
498
0.34049
515
0.340476
567
0.340463
605
0.34045
656
0.340436
728
0.340423
769
0.34041
787
0.340396
971
0.340383
988
0.34037
1085
0.340357
1242
0.340343
1315
0.34033
1422
0.340317
1611
0.340303
1698
0.34029
1764
0.340277
1951
0.340264
1992
0.34025
2107
0.340237
2114
0.340224
2095
0.340211
2170
0.340197
2140
0.340184
1947
0.340171
1910
0.340157
1713
0.340144
1611
0.340131
1362
0.340118
1296
0.340104
1207
0.340091
1053
0.340078
934
0.340065
751
0.340051
669
0.340038
531
0.340025
504
0.340012
410
0.339998
358
0.339985
274
0.339972
277
0.339959
293
0.339945
185
0.339932
205
0.339919
119
0.339906
166
0.339892
151
0.339879
144
0.339866
162
0.339853
77
0.339839
82
0.339826
108
0.339813
66
0.3398
83
0.339787
61
0.339773
93
0.33976
104
0.339747
63
0.339734
58
0.33972
40
0.339707
104
0.339694
88
0.339681
40
0.339668
71
0.339654
70
0.339641
47
0.339628
68
0.339615
57
0.339601
108
0.339588
59
0.339575
31
0.339562
12
0.339549
0
0.339535
36
0.339522
92
0.339509
76
0.339496
86
0.339483
56
0.339469
56
0.339456
34
0.339443
70
0.33943
52
0.339417
64
0.339404
64
0.33939
66
0.339377
52
0.339364
84
0.339351
68
0.339338
54
0.339324
64
0.339311
108
0.339298
16
0.339285
89
0.339272
87
0.339259
89
0.339245
77
0.339232
48
0.339219
40
0.339206
51
0.339193
77
0.33918
7
0.339166
0
0.339153
21
0.33914
31
0.339127
22
0.339114
63
0.339101
48
0.339087
116
0.339074
45
0.339061
42
0.339048
40
0.339035
87
0.339022
35
0.339008
8
0.338995
18
0.338982
69
0.338969
52
0.338956
120
0.338943
56
0.33893
52
0.338916
54
0.338903
54
0.33889
86
0.338877
38
0.338864
70
0.338851
51
0.338838
24
0.338825
78
0.338811
 
OLD OXIDIZED Si3N4 COATING (90 DEG TOA, AS RECEIVE
2003
5
10
14
54
14
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
4
1000
2000
55
0
data_4
data_4
-1
Binding energy
eV
538
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
512
0
5870
0.388089
0.392978
224
0.392978
219
0.392958
175
0.392939
192
0.392919
202
0.3929
103
0.39288
208
0.392861
170
0.392841
198
0.392822
174
0.392803
147
0.392783
113
0.392764
155
0.392744
196
0.392725
140
0.392705
135
0.392686
169
0.392666
107
0.392647
149
0.392627
101
0.392608
136
0.392589
65
0.392569
83
0.39255
122
0.39253
144
0.392511
136
0.392491
139
0.392472
150
0.392452
101
0.392433
102
0.392414
58
0.392394
87
0.392375
59
0.392355
67
0.392336
91
0.392317
116
0.392297
107
0.392278
102
0.392258
77
0.392239
121
0.39222
114
0.3922
157
0.392181
226
0.392161
135
0.392142
92
0.392123
67
0.392103
113
0.392084
162
0.392064
65
0.392045
90
0.392026
124
0.392006
169
0.391987
63
0.391968
167
0.391948
115
0.391929
129
0.39191
129
0.39189
197
0.391871
129
0.391852
100
0.391832
118
0.391813
86
0.391793
77
0.391774
76
0.391755
103
0.391735
119
0.391716
92
0.391697
79
0.391677
61
0.391658
115
0.391639
185
0.39162
131
0.3916
87
0.391581
49
0.391562
138
0.391542
170
0.391523
82
0.391504
158
0.391484
127
0.391465
143
0.391446
72
0.391426
99
0.391407
119
0.391388
144
0.391369
155
0.391349
177
0.39133
115
0.391311
159
0.391292
166
0.391272
92
0.391253
215
0.391234
184
0.391214
166
0.391195
219
0.391176
193
0.391157
186
0.391137
254
0.391118
171
0.391099
239
0.39108
278
0.39106
397
0.391041
402
0.391022
354
0.391003
393
0.390983
515
0.390964
504
0.390945
553
0.390926
594
0.390907
826
0.390887
977
0.390868
947
0.390849
1139
0.39083
1332
0.39081
1466
0.390791
1615
0.390772
1937
0.390753
2186
0.390734
2423
0.390714
2723
0.390695
2969
0.390676
3412
0.390657
3698
0.390638
3932
0.390619
4190
0.390599
4591
0.39058
4917
0.390561
5059
0.390542
5387
0.390523
5495
0.390503
5652
0.390484
5870
0.390465
5791
0.390446
5686
0.390427
5361
0.390408
5172
0.390388
5016
0.390369
4941
0.39035
4479
0.390331
4150
0.390312
3986
0.390293
3556
0.390274
3223
0.390254
2896
0.390235
2558
0.390216
2303
0.390197
1918
0.390178
1708
0.390159
1585
0.39014
1378
0.390121
1253
0.390101
1128
0.390082
956
0.390063
879
0.390044
807
0.390025
650
0.390006
573
0.389987
514
0.389968
463
0.389949
411
0.389929
425
0.38991
337
0.389891
357
0.389872
294
0.389853
238
0.389834
241
0.389815
180
0.389796
258
0.389777
213
0.389758
97
0.389739
212
0.38972
208
0.389701
146
0.389681
168
0.389662
126
0.389643
92
0.389624
123
0.389605
109
0.389586
45
0.389567
78
0.389548
19
0.389529
119
0.38951
72
0.389491
71
0.389472
64
0.389453
151
0.389434
60
0.389415
67
0.389396
43
0.389377
86
0.389358
102
0.389339
147
0.38932
143
0.389301
90
0.389282
60
0.389263
92
0.389244
79
0.389225
6
0.389206
117
0.389187
130
0.389168
125
0.389149
90
0.38913
83
0.389111
103
0.389092
51
0.389073
84
0.389054
51
0.389035
0
0.389016
99
0.388997
51
0.388978
66
0.388959
86
0.38894
39
0.388921
92
0.388902
62
0.388883
114
0.388864
86
0.388845
135
0.388826
70
0.388807
87
0.388788
145
0.388769
51
0.38875
78
0.388731
151
0.388713
101
0.388694
82
0.388675
76
0.388656
99
0.388637
62
0.388618
81
0.388599
65
0.38858
94
0.388561
105
0.388542
37
0.388523
115
0.388504
97
0.388485
60
0.388467
104
0.388448
75
0.388429
60
0.38841
67
0.388391
64
0.388372
84
0.388353
56
0.388334
55
0.388315
107
0.388297
71
0.388278
75
0.388259
51
0.38824
71
0.388221
123
0.388202
114
0.388183
104
0.388164
149
0.388146
97
0.388127
136
0.388108
70
0.388089
 
OLD OXIDIZED Si3N4 COATING (90 DEG TOA, AS RECEIVE
2003
5
10
14
54
14
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
4
1000
2000
55
0
data_5
data_5
-1
Binding energy
eV
1000
-0.977517
2
counts
d
Transmission
d
pulse counting
0.2
2
4.00E-06
0
0
0
0
2048
146
20032
0.300125
0.586563
2454
0.586563
2580
0.585857
2696
0.585154
2828
0.584452
2792
0.583753
2781
0.583056
2660
0.582362
2617
0.581669
2472
0.580979
2477
0.580291
2620
0.579605
2509
0.578921
2487
0.578239
2416
0.57756
2471
0.576883
2474
0.576207
2480
0.575534
2529
0.574863
2505
0.574194
2570
0.573527
2625
0.572862
2836
0.5722
2896
0.571539
3037
0.57088
3166
0.570223
3359
0.569569
3491
0.568916
3381
0.568265
3173
0.567617
3048
0.56697
2849
0.566325
2708
0.565682
2581
0.565041
2451
0.564402
2384
0.563765
2360
0.56313
2170
0.562497
2179
0.561866
2002
0.561236
2018
0.560609
1936
0.559983
1907
0.559359
2011
0.558737
1847
0.558117
1961
0.557499
1884
0.556882
1823
0.556268
1954
0.555655
1858
0.555044
1882
0.554434
1894
0.553827
1898
0.553221
1891
0.552617
1969
0.552015
1922
0.551415
1876
0.550816
1977
0.550219
1931
0.549624
1916
0.54903
1897
0.548438
1860
0.547848
1901
0.54726
1939
0.546673
1942
0.546088
1943
0.545504
1912
0.544922
1902
0.544342
2010
0.543764
1985
0.543187
1916
0.542612
1963
0.542038
1967
0.541466
2010
0.540896
2030
0.540327
1992
0.53976
1974
0.539194
2003
0.53863
1904
0.538068
1978
0.537507
2009
0.536948
1966
0.53639
1962
0.535834
1970
0.535279
1953
0.534726
1985
0.534174
1988
0.533624
1914
0.533075
1960
0.532528
1993
0.531983
1971
0.531438
1967
0.530896
1963
0.530355
1932
0.529815
1895
0.529277
2038
0.52874
2013
0.528204
2036
0.527671
2039
0.527138
2059
0.526607
2045
0.526077
1970
0.525549
2039
0.525022
1963
0.524497
1998
0.523973
1982
0.52345
1996
0.522929
2025
0.522409
1938
0.521891
1978
0.521374
2042
0.520858
2021
0.520344
1965
0.519831
2048
0.519319
2054
0.518809
2057
0.5183
2007
0.517792
2019
0.517286
2048
0.516781
2067
0.516277
2002
0.515775
2035
0.515274
2014
0.514774
2109
0.514276
2121
0.513778
2095
0.513282
1987
0.512788
2063
0.512294
2171
0.511802
2182
0.511311
2151
0.510822
2162
0.510333
2038
0.509846
2098
0.50936
2144
0.508876
2105
0.508392
2132
0.50791
2091
0.507429
2115
0.506949
2205
0.506471
2094
0.505993
2168
0.505517
2151
0.505042
2161
0.504569
2117
0.504096
2215
0.503625
2131
0.503154
2088
0.502685
2151
0.502217
2188
0.501751
2234
0.501285
2132
0.500821
2154
0.500357
2125
0.499895
2190
0.499434
2235
0.498974
2200
0.498515
2196
0.498058
2113
0.497601
2193
0.497146
2148
0.496692
2184
0.496238
2156
0.495786
2295
0.495335
2281
0.494885
2214
0.494437
2129
0.493989
2197
0.493542
2143
0.493097
2161
0.492652
2194
0.492209
2190
0.491766
2209
0.491325
2192
0.490885
2158
0.490445
2203
0.490007
2289
0.48957
2223
0.489134
2228
0.488699
2419
0.488265
2263
0.487832
2297
0.4874
2184
0.486969
2206
0.486539
2238
0.48611
2145
0.485682
2207
0.485255
2315
0.48483
2260
0.484405
2273
0.483981
2270
0.483558
2185
0.483136
2295
0.482715
2279
0.482295
2239
0.481876
2315
0.481458
2345
0.481041
2315
0.480624
2322
0.480209
2276
0.479795
2326
0.479382
2270
0.47897
2379
0.478558
2284
0.478148
2315
0.477738
2332
0.47733
2332
0.476922
2350
0.476515
2320
0.47611
2382
0.475705
2417
0.475301
2309
0.474898
2347
0.474496
2287
0.474094
2341
0.473694
2397
0.473295
2442
0.472896
2376
0.472499
2304
0.472102
2392
0.471706
2400
0.471311
2418
0.470917
2442
0.470524
2373
0.470131
2272
0.46974
2486
0.469349
2389
0.46896
2399
0.468571
2377
0.468183
2397
0.467796
2446
0.467409
2469
0.467024
2476
0.466639
2438
0.466256
2392
0.465873
2440
0.465491
2452
0.465109
2502
0.464729
2447
0.464349
2448
0.463971
2386
0.463593
2427
0.463215
2378
0.462839
2504
0.462464
2413
0.462089
2498
0.461715
2564
0.461342
2542
0.46097
2477
0.460598
2453
0.460228
2454
0.459858
2548
0.459489
2559
0.459121
2455
0.458753
2555
0.458386
2425
0.45802
2455
0.457655
2505
0.457291
2578
0.456927
2548
0.456564
2626
0.456202
2563
0.455841
2590
0.455481
2488
0.455121
2571
0.454762
2643
0.454403
2520
0.454046
2562
0.453689
2567
0.453333
2572
0.452978
2591
0.452623
2607
0.452269
2573
0.451916
2569
0.451564
2685
0.451213
2659
0.450862
2609
0.450511
2636
0.450162
2532
0.449813
2576
0.449465
2663
0.449118
2566
0.448772
2657
0.448426
2629
0.448081
2724
0.447736
2651
0.447393
2645
0.44705
2627
0.446707
2693
0.446366
2687
0.446025
2623
0.445684
2662
0.445345
2668
0.445006
2657
0.444668
2590
0.44433
2771
0.443994
2714
0.443658
2588
0.443322
2694
0.442987
2655
0.442653
2731
0.44232
2672
0.441987
2712
0.441655
2718
0.441324
2638
0.440993
2712
0.440663
2714
0.440333
2688
0.440005
2846
0.439676
2776
0.439349
2716
0.439022
2713
0.438696
2788
0.438371
2725
0.438046
2726
0.437721
2793
0.437398
2827
0.437075
2756
0.436752
2741
0.436431
2834
0.43611
2773
0.435789
2783
0.435469
2775
0.43515
2859
0.434832
2833
0.434514
2815
0.434196
2820
0.43388
2740
0.433564
2832
0.433248
2914
0.432933
2780
0.432619
2843
0.432305
2826
0.431992
2800
0.43168
2874
0.431368
2906
0.431057
2875
0.430746
2909
0.430436
2787
0.430127
2847
0.429818
2899
0.42951
2768
0.429202
2939
0.428895
2839
0.428588
2749
0.428282
2843
0.427977
2884
0.427672
2951
0.427368
2971
0.427065
2872
0.426762
2860
0.426459
2925
0.426157
2893
0.425856
2904
0.425555
2915
0.425255
2835
0.424955
2897
0.424656
3019
0.424358
2968
0.42406
3007
0.423762
2958
0.423466
2920
0.423169
2959
0.422874
2986
0.422579
3106
0.422284
2948
0.42199
3024
0.421696
2959
0.421403
3041
0.421111
3007
0.420819
3036
0.420528
3070
0.420237
3041
0.419946
3032
0.419657
3025
0.419368
3002
0.419079
2893
0.418791
3082
0.418503
3010
0.418216
3044
0.417929
3023
0.417643
3213
0.417358
3133
0.417073
3076
0.416788
3086
0.416504
3128
0.416221
3104
0.415938
3098
0.415655
3081
0.415373
3089
0.415092
3144
0.414811
3216
0.414531
3205
0.414251
3247
0.413971
3228
0.413693
3216
0.413414
3286
0.413136
3246
0.412859
3390
0.412582
3344
0.412305
3251
0.41203
3338
0.411754
3221
0.411479
3336
0.411205
3366
0.410931
3221
0.410657
3379
0.410384
3440
0.410112
3423
0.40984
3262
0.409568
3346
0.409297
3279
0.409027
3320
0.408757
3371
0.408487
3410
0.408218
3388
0.407949
3379
0.407681
3278
0.407413
3500
0.407146
3459
0.406879
3484
0.406613
3477
0.406347
3557
0.406081
3535
0.405816
3595
0.405552
3581
0.405288
3429
0.405024
3631
0.404761
3520
0.404499
3410
0.404236
3512
0.403975
3536
0.403713
3607
0.403452
3671
0.403192
3648
0.402932
3570
0.402673
3644
0.402414
3720
0.402155
3548
0.401897
3491
0.401639
3638
0.401382
3748
0.401125
3656
0.400868
3720
0.400612
3730
0.400357
3696
0.400102
3669
0.399847
3723
0.399593
3751
0.399339
3798
0.399086
3942
0.398833
3699
0.39858
3802
0.398328
3908
0.398076
3934
0.397825
3859
0.397574
4023
0.397324
4091
0.397074
4184
0.396824
4073
0.396575
4165
0.396326
4164
0.396078
4155
0.39583
4082
0.395583
3921
0.395335
3932
0.395089
3972
0.394843
3890
0.394597
3988
0.394351
3813
0.394106
3852
0.393862
3782
0.393617
3682
0.393374
3710
0.39313
3665
0.392887
3547
0.392644
3482
0.392402
3522
0.39216
3617
0.391919
3613
0.391678
3625
0.391437
4064
0.391197
5579
0.390957
9877
0.390718
14152
0.390479
9739
0.39024
5214
0.390002
3932
0.389764
3686
0.389526
3582
0.389289
3488
0.389052
3578
0.388816
3559
0.38858
3520
0.388344
3458
0.388109
3564
0.387874
3479
0.38764
3476
0.387406
3535
0.387172
3547
0.386939
3534
0.386706
3640
0.386473
3521
0.386241
3601
0.386009
3618
0.385778
3609
0.385547
3649
0.385316
3728
0.385086
3639
0.384856
3662
0.384626
3655
0.384397
3551
0.384168
3544
0.383939
3631
0.383711
3571
0.383483
3650
0.383256
3616
0.383029
3670
0.382802
3618
0.382576
3610
0.38235
3639
0.382124
3772
0.381899
3658
0.381674
3735
0.381449
3642
0.381225
3753
0.381001
3639
0.380777
3703
0.380554
3712
0.380331
3682
0.380109
3880
0.379887
3765
0.379665
3801
0.379443
3686
0.379222
3642
0.379001
3646
0.378781
3809
0.378561
3799
0.378341
3810
0.378122
3862
0.377903
3847
0.377684
3840
0.377465
3805
0.377247
3907
0.37703
3835
0.376812
3666
0.376595
3918
0.376379
3884
0.376162
3974
0.375946
3942
0.37573
3846
0.375515
3954
0.3753
3880
0.375085
3906
0.374871
3896
0.374657
3826
0.374443
3882
0.374229
3896
0.374016
3921
0.373803
3903
0.373591
3941
0.373379
3892
0.373167
4004
0.372956
3965
0.372744
3993
0.372533
3962
0.372323
4097
0.372113
4150
0.371903
4115
0.371693
3934
0.371484
4038
0.371275
4078
0.371066
4076
0.370858
4219
0.37065
4089
0.370442
4024
0.370235
4092
0.370028
4074
0.369821
4129
0.369614
4040
0.369408
4008
0.369202
3933
0.368997
3973
0.368791
3900
0.368586
3855
0.368382
3831
0.368177
3808
0.367973
3790
0.36777
3830
0.367566
3913
0.367363
3814
0.36716
3947
0.366958
4030
0.366755
4125
0.366553
4079
0.366352
4518
0.36615
4421
0.365949
4778
0.365749
4713
0.365548
4671
0.365348
4607
0.365148
4358
0.364948
4242
0.364749
3996
0.36455
3802
0.364351
3541
0.364153
3473
0.363955
3191
0.363757
2991
0.363559
2848
0.363362
2620
0.363165
2423
0.362968
2442
0.362772
2224
0.362576
2210
0.36238
2039
0.362184
1859
0.361989
1932
0.361794
2034
0.361599
2476
0.361404
4592
0.36121
12765
0.361016
20032
0.360823
10275
0.360629
3402
0.360436
2065
0.360243
1855
0.360051
1819
0.359859
1783
0.359667
1733
0.359475
1793
0.359283
1646
0.359092
1755
0.358901
1801
0.358711
1769
0.35852
1727
0.35833
1766
0.35814
1739
0.357951
1692
0.357762
1616
0.357573
1791
0.357384
1641
0.357195
1724
0.357007
1747
0.356819
1767
0.356631
1730
0.356444
1688
0.356257
1678
0.35607
1751
0.355883
1685
0.355697
1762
0.355511
1660
0.355325
1748
0.355139
1765
0.354954
1836
0.354769
1771
0.354584
1728
0.354399
1724
0.354215
1741
0.354031
1783
0.353847
1713
0.353664
1779
0.35348
1775
0.353297
1779
0.353114
1702
0.352932
1755
0.352749
1748
0.352567
1807
0.352386
1794
0.352204
1858
0.352023
1808
0.351842
1744
0.351661
1825
0.35148
1824
0.3513
1928
0.35112
1809
0.35094
1779
0.350761
1827
0.350581
1813
0.350402
1762
0.350223
1798
0.350045
1874
0.349866
1844
0.349688
1832
0.34951
1820
0.349333
1753
0.349155
1772
0.348978
1864
0.348801
1854
0.348625
1871
0.348448
1837
0.348272
1934
0.348096
1870
0.34792
1933
0.347745
1804
0.34757
1899
0.347395
1904
0.34722
1904
0.347045
1982
0.346871
1938
0.346697
1902
0.346523
1941
0.34635
1990
0.346176
1949
0.346003
1961
0.34583
2016
0.345657
1952
0.345485
1994
0.345313
2055
0.345141
1922
0.344969
1982
0.344797
2110
0.344626
1967
0.344455
1963
0.344284
1917
0.344113
2003
0.343943
2078
0.343773
2063
0.343603
2064
0.343433
2149
0.343264
2056
0.343094
1971
0.342925
2036
0.342756
1962
0.342588
2002
0.342419
1944
0.342251
1975
0.342083
1951
0.341916
1878
0.341748
1969
0.341581
1949
0.341414
1890
0.341247
1989
0.34108
2157
0.340914
2392
0.340747
2572
0.340581
3560
0.340416
5300
0.34025
4564
0.340085
2474
0.33992
1909
0.339755
1916
0.33959
1847
0.339425
1826
0.339261
1870
0.339097
1911
0.338933
1902
0.33877
1894
0.338606
1861
0.338443
1939
0.33828
1875
0.338117
1934
0.337954
1935
0.337792
1899
0.33763
1873
0.337468
1861
0.337306
1834
0.337144
1997
0.336983
1924
0.336822
2010
0.336661
1938
0.3365
1932
0.33634
1914
0.336179
1993
0.336019
1948
0.335859
1882
0.3357
1958
0.33554
1956
0.335381
1851
0.335222
1922
0.335063
1873
0.334904
1920
0.334745
2021
0.334587
1950
0.334429
2034
0.334271
2034
0.334113
2106
0.333956
1931
0.333798
1997
0.333641
2094
0.333484
1911
0.333328
1973
0.333171
2052
0.333015
2007
0.332859
2078
0.332703
2067
0.332547
2064
0.332391
2099
0.332236
2031
0.332081
2071
0.331926
2063
0.331771
2004
0.331616
2078
0.331462
2028
0.331308
2075
0.331154
2040
0.331
2074
0.330846
2057
0.330693
2004
0.33054
2072
0.330386
2127
0.330234
2059
0.330081
2128
0.329928
2152
0.329776
2074
0.329624
2010
0.329472
2148
0.32932
2021
0.329169
2168
0.329017
2072
0.328866
2177
0.328715
2150
0.328564
2013
0.328414
2133
0.328263
2177
0.328113
2277
0.327963
2212
0.327813
2239
0.327663
2249
0.327513
2257
0.327364
2234
0.327215
2248
0.327066
2277
0.326917
2334
0.326768
2330
0.32662
2329
0.326472
2283
0.326324
2202
0.326176
2265
0.326028
2328
0.32588
2299
0.325733
2190
0.325586
2269
0.325439
2233
0.325292
2237
0.325145
2151
0.324999
2272
0.324852
2231
0.324706
2253
0.32456
2309
0.324414
2325
0.324269
2273
0.324123
2360
0.323978
2447
0.323833
2470
0.323688
2611
0.323543
2617
0.323399
2755
0.323254
2796
0.32311
2784
0.322966
2729
0.322822
2662
0.322678
2641
0.322535
2512
0.322391
2414
0.322248
2309
0.322105
2263
0.321962
2170
0.321819
2089
0.321677
1924
0.321534
1880
0.321392
1813
0.32125
1696
0.321108
1624
0.320967
1576
0.320825
1542
0.320684
1546
0.320543
1612
0.320401
1784
0.320261
2239
0.32012
3354
0.319979
6102
0.319839
9449
0.319699
7840
0.319559
4140
0.319419
2493
0.319279
1897
0.31914
1635
0.319
1517
0.318861
1395
0.318722
1393
0.318583
1393
0.318444
1359
0.318306
1315
0.318167
1289
0.318029
1260
0.317891
1264
0.317753
1300
0.317615
1231
0.317477
1257
0.31734
1268
0.317203
1306
0.317065
1280
0.316928
1286
0.316792
1348
0.316655
1337
0.316518
1445
0.316382
1464
0.316246
1523
0.31611
1643
0.315974
1666
0.315838
1791
0.315702
1802
0.315567
1716
0.315432
1482
0.315297
1484
0.315162
1391
0.315027
1420
0.314892
1182
0.314758
1083
0.314623
1013
0.314489
840
0.314355
814
0.314221
757
0.314087
755
0.313954
692
0.31382
700
0.313687
553
0.313554
464
0.313421
392
0.313288
366
0.313155
506
0.313023
1060
0.31289
3213
0.312758
7921
0.312626
8674
0.312494
3199
0.312362
801
0.312231
395
0.312099
305
0.311968
266
0.311837
228
0.311705
228
0.311575
217
0.311444
208
0.311313
227
0.311183
240
0.311052
240
0.310922
239
0.310792
226
0.310662
215
0.310533
207
0.310403
224
0.310273
209
0.310144
245
0.310015
227
0.309886
236
0.309757
237
0.309628
226
0.3095
255
0.309371
291
0.309243
254
0.309115
222
0.308987
246
0.308859
245
0.308731
245
0.308603
245
0.308476
239
0.308349
236
0.308221
270
0.308094
244
0.307967
263
0.307841
254
0.307714
279
0.307588
249
0.307461
251
0.307335
254
0.307209
257
0.307083
256
0.306957
239
0.306832
243
0.306706
243
0.306581
241
0.306455
228
0.30633
246
0.306205
246
0.30608
262
0.305956
259
0.305831
258
0.305707
259
0.305582
268
0.305458
295
0.305334
306
0.30521
318
0.305087
324
0.304963
316
0.304839
257
0.304716
307
0.304593
321
0.30447
279
0.304347
254
0.304224
266
0.304101
302
0.303979
280
0.303856
277
0.303734
267
0.303612
255
0.30349
269
0.303368
267
0.303246
289
0.303124
296
0.303003
334
0.302881
411
0.30276
411
0.302639
448
0.302518
380
0.302397
327
0.302276
387
0.302156
534
0.302035
537
0.301915
528
0.301795
385
0.301674
246
0.301554
176
0.301435
176
0.301315
237
0.301195
335
0.301076
388
0.300956
367
0.300837
295
0.300718
281
0.300599
280
0.30048
264
0.300362
175
0.300243
146
0.300125
 
OLD OXIDIZED Si3N4 COATING (90 DEG TOA, AS RECEIVE
2003
5
10
14
54
14
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
4
1000
2000
55
0
data_6
data_6
-1
Binding energy
eV
40
-0.130548
2
counts
d
Transmission
d
pulse counting
0.2
400
4.00E-06
0
0
0
0
768
0
0
0.29892
0.305077
0
0.305077
0
0.30506
0
0.305044
0
0.305027
0
0.305011
0
0.304994
0
0.304978
0
0.304961
0
0.304945
0
0.304928
0
0.304912
0
0.304895
0
0.304879
0
0.304862
0
0.304846
0
0.304829
0
0.304813
0
0.304796
0
0.30478
0
0.304763
0
0.304747
0
0.30473
0
0.304714
0
0.304697
0
0.304681
0
0.304664
0
0.304648
0
0.304631
0
0.304615
0
0.304599
0
0.304582
0
0.304566
0
0.304549
0
0.304533
0
0.304516
0
0.3045
0
0.304483
0
0.304467
0
0.304451
0
0.304434
0
0.304418
0
0.304401
0
0.304385
0
0.304368
0
0.304352
0
0.304336
0
0.304319
0
0.304303
0
0.304286
0
0.30427
0
0.304254
0
0.304237
0
0.304221
0
0.304204
0
0.304188
0
0.304172
0
0.304155
0
0.304139
0
0.304123
0
0.304106
0
0.30409
0
0.304073
0
0.304057
0
0.304041
0
0.304024
0
0.304008
0
0.303992
0
0.303975
0
0.303959
0
0.303942
0
0.303926
0
0.30391
0
0.303893
0
0.303877
0
0.303861
0
0.303844
0
0.303828
0
0.303812
0
0.303795
0
0.303779
0
0.303763
0
0.303746
0
0.30373
0
0.303714
0
0.303697
0
0.303681
0
0.303665
0
0.303648
0
0.303632
0
0.303616
0
0.3036
0
0.303583
0
0.303567
0
0.303551
0
0.303534
0
0.303518
0
0.303502
0
0.303485
0
0.303469
0
0.303453
0
0.303437
0
0.30342
0
0.303404
0
0.303388
0
0.303371
0
0.303355
0
0.303339
0
0.303323
0
0.303306
0
0.30329
0
0.303274
0
0.303258
0
0.303241
0
0.303225
0
0.303209
0
0.303193
0
0.303176
0
0.30316
0
0.303144
0
0.303128
0
0.303111
0
0.303095
0
0.303079
0
0.303063
0
0.303046
0
0.30303
0
0.303014
0
0.302998
0
0.302982
0
0.302965
0
0.302949
0
0.302933
0
0.302917
0
0.3029
0
0.302884
0
0.302868
0
0.302852
0
0.302836
0
0.302819
0
0.302803
0
0.302787
0
0.302771
0
0.302755
0
0.302739
0
0.302722
0
0.302706
0
0.30269
0
0.302674
0
0.302658
0
0.302641
0
0.302625
0
0.302609
0
0.302593
0
0.302577
0
0.302561
0
0.302544
0
0.302528
0
0.302512
0
0.302496
0
0.30248
0
0.302464
0
0.302448
0
0.302431
0
0.302415
0
0.302399
0
0.302383
0
0.302367
0
0.302351
0
0.302335
0
0.302319
0
0.302302
0
0.302286
0
0.30227
0
0.302254
0
0.302238
0
0.302222
0
0.302206
0
0.30219
0
0.302174
0
0.302157
0
0.302141
0
0.302125
0
0.302109
0
0.302093
0
0.302077
0
0.302061
0
0.302045
0
0.302029
0
0.302013
0
0.301997
0
0.30198
0
0.301964
0
0.301948
0
0.301932
0
0.301916
0
0.3019
0
0.301884
0
0.301868
0
0.301852
0
0.301836
0
0.30182
0
0.301804
0
0.301788
0
0.301772
0
0.301756
0
0.30174
0
0.301724
0
0.301707
0
0.301691
0
0.301675
0
0.301659
0
0.301643
0
0.301627
0
0.301611
0
0.301595
0
0.301579
0
0.301563
0
0.301547
0
0.301531
0
0.301515
0
0.301499
0
0.301483
0
0.301467
0
0.301451
0
0.301435
0
0.301419
0
0.301403
0
0.301387
0
0.301371
0
0.301355
0
0.301339
0
0.301323
0
0.301307
0
0.301291
0
0.301275
0
0.301259
0
0.301243
0
0.301227
0
0.301211
0
0.301195
0
0.301179
0
0.301164
0
0.301148
0
0.301132
0
0.301116
0
0.3011
0
0.301084
0
0.301068
0
0.301052
0
0.301036
0
0.30102
0
0.301004
0
0.300988
0
0.300972
0
0.300956
0
0.30094
0
0.300924
0
0.300908
0
0.300893
0
0.300877
0
0.300861
0
0.300845
0
0.300829
0
0.300813
0
0.300797
0
0.300781
0
0.300765
0
0.300749
0
0.300733
0
0.300718
0
0.300702
0
0.300686
0
0.30067
0
0.300654
0
0.300638
0
0.300622
0
0.300606
0
0.30059
0
0.300575
0
0.300559
0
0.300543
0
0.300527
0
0.300511
0
0.300495
0
0.300479
0
0.300463
0
0.300448
0
0.300432
0
0.300416
0
0.3004
0
0.300384
0
0.300368
0
0.300352
0
0.300337
0
0.300321
0
0.300305
0
0.300289
0
0.300273
0
0.300257
0
0.300242
0
0.300226
0
0.30021
0
0.300194
0
0.300178
0
0.300163
0
0.300147
0
0.300131
0
0.300115
0
0.300099
0
0.300083
0
0.300068
0
0.300052
0
0.300036
0
0.30002
0
0.300004
0
0.299989
0
0.299973
0
0.299957
0
0.299941
0
0.299925
0
0.29991
0
0.299894
0
0.299878
0
0.299862
0
0.299847
0
0.299831
0
0.299815
0
0.299799
0
0.299783
0
0.299768
0
0.299752
0
0.299736
0
0.29972
0
0.299705
0
0.299689
0
0.299673
0
0.299657
0
0.299642
0
0.299626
0
0.29961
0
0.299594
0
0.299579
0
0.299563
0
0.299547
0
0.299532
0
0.299516
0
0.2995
0
0.299484
0
0.299469
0
0.299453
0
0.299437
0
0.299421
0
0.299406
0
0.29939
0
0.299374
0
0.299359
0
0.299343
0
0.299327
0
0.299312
0
0.299296
0
0.29928
0
0.299264
0
0.299249
0
0.299233
0
0.299217
0
0.299202
0
0.299186
0
0.29917
0
0.299155
0
0.299139
0
0.299123
0
0.299108
0
0.299092
0
0.299076
0
0.299061
0
0.299045
0
0.299029
0
0.299014
0
0.298998
0
0.298982
0
0.298967
0
0.298951
0
0.298935
0
0.29892
end of experiment
